Laser-doping of crystalline silicon substrates using doped silicon nanoparticles

✍ Scribed by Meseth, Martin; Lamine, Kais; Dehnen, Martin; Kayser, Sven; Brock, Wolfgang; Behrenberg, Dennis; Orthner, Hans; Elsukova, Anna; Hartmann, Nils; Wiggers, Hartmut; Hülser, Tim; Nienhaus, Hermann; Benson, Niels; Schmechel, Roland

• Book ID: 121265122
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 926 KB
• Volume: 548
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2013.09.056