Excimer laser and rapid thermal annealing stimulation of solid-phase nucleation and crystallization in amorphous silicon films on glass substrates

✍ Scribed by Efremov, M D; Bolotov, V V; Volodin, V A; Fedina, L I; Lipatnikov, E A

• Book ID: 121012685
• Publisher: Institute of Physics
• Year: 1996
• Tongue: English
• Weight: 493 KB
• Volume: 8
• Category: Article
• ISSN: 0953-8984
• DOI: 10.1088/0953-8984/8/3/007