Modeling and Experimental Analysis in Excimer-Laser Crystallization of Amorphous Si Films on a Glass Substrate with Different Buffer Layers

Modeling analysis of melting and solidif

Modeling analysis of melting and solidifying processes in excimer laser crystallization of a-Si films with effective specific heat-enthalpy method

✍ Chien-Hung Chang; Long-Sun Chao 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 380 KB

In this work, an efficient two-dimensional numerical model is built to predict the critical fluences (Fc) during the irradiation of excimer laser on a-Si films. One aim of this paper is the modeling of conduction heat transfer with phase change. The specific heat/enthalpy method is used to handle th