Impact of rapid thermal annealing and hydrogenation on the doping concentration and carrier mobility in solid phase crystallized poly-Si thin films

✍ Scribed by Kumar, A.; Widenborg, P.I.; Hidayat, H.; Zixuan, Qiu; Aberle, A.G.

• Book ID: 121219776
• Publisher: Cambridge University Press
• Year: 2011
• Weight: 240 KB
• Volume: 1321
• Category: Article
• ISSN: 0272-9172
• DOI: 10.1557/opl.2011.932