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Evaluation of the bonded silicon on insulator (SOI) wafer and the characteristics of PIN photodiodes on the bonded SOI wafer

✍ Scribed by Usami, A.; Kaneko, K.; Fujii, Y.; Ichimura, M.


Book ID
114536043
Publisher
IEEE
Year
1995
Tongue
English
Weight
441 KB
Volume
42
Category
Article
ISSN
0018-9383

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