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The effect of atmospheric moisture on crack propagation in the interface between directly bonded silicon wafers

โœ Scribed by V. Masteika, J. Kowal, N. St. J. Braitwaite, T. Rogers


Book ID
120914859
Publisher
Springer-Verlag
Year
2012
Tongue
English
Weight
320 KB
Volume
19
Category
Article
ISSN
0946-7076

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