Evaluation of oxide-chemical mechanical polishing characteristics using ceria-mixed abrasive slurry

✍ Scribed by Youngkyun Lee, Yong-Jin Seo, Haedo Jeong

• Book ID: 118303725
• Publisher: The Korean Institute of Metals and Materials
• Year: 2012
• Tongue: English
• Weight: 473 KB
• Volume: 8
• Category: Article
• ISSN: 1738-8090
• DOI: 10.1007/s13391-012-2056-4