Chemical mechanical polishing and electrochemical characteristics of tungsten using mixed oxidizers with hydrogen peroxide and ferric nitrate

✍ Scribed by Yong-Jin Seo; Nam-Hoon Kim; Woo-Sun Lee

• Book ID: 113789411
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 395 KB
• Volume: 60
• Category: Article
• ISSN: 0167-577X
• DOI: 10.1016/j.matlet.2005.10.113