Electrochemical corrosion effects and chemical mechanical polishing characteristics of tungsten film using mixed oxidizers

✍ Scribed by Yong-Jin Seo; Nam-Hoon Kim; Woo-Sun Lee

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 349 KB
• Volume: 83
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2005.11.006