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Evaluation of Carbon and Oxygen Content of Silicon Wafers Using Infrared Absorption

✍ Scribed by Mead, D. G.; Lowry, S. R.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Detection and mapping of oxygen in silic

✍ Torchio, Philippe ;Occelli, Roland 📂 Article 📅 1997 🏛 Springer 🌐 English ⚖ 494 KB

Accurate infrared absorption measurement

✍ O. De Gryse; P. Clauws; L. Rossou; J. Van Landuyt; J. Vanhellemont 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 68 KB

Investigations of oxygen precipitates in

✍ J.P. Fillard 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 574 KB

Quantitative Infrared Spectroscopy of In

✍ Linn, J. H.; Hanley, K. L. 📂 Article 📅 1993 🏛 Society for Applied Spectroscopy 🌐 English ⚖ 535 KB

Evaluation of Silicon Wafers with Differ

✍ Tesař, L. ;Lenhard, R. 📂 Article 📅 1989 🏛 John Wiley and Sons 🌐 English ⚖ 281 KB

Determination of Interstitial Oxygen Con

✍ Hill, Dale E. 📂 Article 📅 1990 🏛 The Electrochemical Society 🌐 English ⚖ 386 KB