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Determination of Interstitial Oxygen Concentration in Low-Resistivity n-type Silicon Wafers by Infrared Absorption Measurements

✍ Scribed by Hill, Dale E.

Book ID: 118034921
Publisher: The Electrochemical Society
Year: 1990
Tongue: English
Weight: 386 KB
Volume: 137
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.2086329

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