✦ LIBER ✦

European office for imprint lithography

Book ID: 104367406
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 47 KB
Volume: 17
Category: Article
ISSN: 0961-1290
DOI: 10.1016/s0961-1290(04)00727-6

No coin nor oath required. For personal study only.

✦ Synopsis

Compact universe

Europe's academic research institutes are clearly impressed with Riber's Compact 21 MBE system. Designed for research and small-scale production, the system can grow single 2" or 3" wafers.

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