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Etching of sub-micron high aspect ratio holes in oxides and polymers

✍ Scribed by R. Boucher; U. Hübner; W. Morgenroth; H. Roth; H.-G. Meyer; M. Schmidt; M. Eich

Book ID: 113797614
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 358 KB
Volume: 73-74
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2004.02.062

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