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Etching effect of the autocloning structure using ion-assisted deposition

✍ Scribed by Yu-Wen Yeh; Te-Hung Chang; Sheng-Hui Chen; Cheng-Chung Lee

Book ID: 106255835
Publisher: Optical Society of Japan
Year: 2009
Tongue: English
Weight: 317 KB
Volume: 16
Category: Article
ISSN: 1340-6000
DOI: 10.1007/s10043-009-0041-4

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