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Etch rates of SiO2 films in deuterated acidic fluorides

✍ Scribed by Lawrence K. White

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Control of relative etch rates of SiO2 a

✍ Rudolf A.H. Heinecke 📂 Article 📅 1975 🏛 Elsevier Science 🌐 English ⚖ 148 KB

Etch rate behaviour of SiO2 films chemic

✍ Irina Kleps; Cristian Pavelescu 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 220 KB

Selective deposition of SiO2 thin films

✍ M.A. Smith; L.L. Levenson 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 316 KB

Etch rate behaviour of SiO2 films chemic

✍ C. Pavelescu; C. Cobianu; L. Condriuc; E. Segal 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 249 KB

Wet-chemical etching of SiO2 and PSG fil

📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 260 KB

Etch rate behaviour of phosphosilicate g

✍ C. Pavelescu; C. Cobianu 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 722 KB