✦ LIBER ✦
Wet-chemical etching of SiO2 and PSG films, and an etching-induced defect in glass-passivated integrated circuits : Werner Kern. RCA Rev.47, 186 (June 1986)
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 260 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0026-2714
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