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Estimating lateral straggling of impurity profiles of ions implanted into crystalline silicon

✍ Scribed by Suzuki, K.; Sudo, R.; Nagase, M.

Book ID: 114538964
Publisher: IEEE
Year: 2001
Tongue: English
Weight: 136 KB
Volume: 48
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.974707

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