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Epitaxy, Composites and Colloids of Gallium Nitride Achieved by Transformation of Single Source Precursor

✍ Scribed by Winkler, H. ;Devi, A. ;Manz, A. ;Wohlfart, A. ;Rogge, W. ;Fischer, R.A.


Publisher
John Wiley and Sons
Year
2000
Tongue
English
Weight
292 KB
Volume
177
Category
Article
ISSN
0031-8965

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Deposition of Thin Films of Gallium Sulfide from a Novel Liquid Single-Source Precursor, Ga(SOCNEt 2 ) 3 , by Aerosol-Assisted CVD. -The novel liquid gallium monothiocarbamato complex (III) is utilized as a single-source precursor for the deposition of face-centered cubic GaS films on glass substra