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Epitaxial lateral overgrowth of InGaN/GaN multiple quantum wells on HVPE GaN template

✍ Scribed by Xingbin Li; Tongjun Yu; Yuebin Tao; Junjing Deng; Chenglong Xu; Guoyi Zhang


Book ID
112182288
Publisher
John Wiley and Sons
Year
2011
Tongue
English
Weight
333 KB
Volume
9
Category
Article
ISSN
1862-6351

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Characterization of GaN/InGaN multiple q
✍ W.K. Fong; K.K. Leung; Charles Surya πŸ“‚ Article πŸ“… 2011 πŸ› Elsevier Science 🌐 English βš– 455 KB

High-quality GaN/InGaN multiple quantum wells (MQWs) were fabricated on nano-scale epitaxial lateral overgrown (NELO) GaN layers. To grow the NELO layer first a 200 nm-thick SiO 2 was deposited on a 2 mmthick undoped GaN layer. A 10 nm-thick Ni layer was then deposited on the SiO 2 film followed by