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Epitaxial growth of cubic SiC by hot filament CVD

✍ Scribed by Hirabayashi, Yasuo; Karasawa, Shiro; Kobayashi, Ken

Book ID: 118328958
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 396 KB
Volume: 128
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(93)90350-6

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