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Growth of cubic boron nitride films by hot filament assisted RF plasma CVD

โœ Scribed by Guo, Yongping ;Song, Zhizhong ;Zhang, Yaxiong ;Zhang, Fangquing ;Chen, Guanghua


Publisher
John Wiley and Sons
Year
1994
Tongue
English
Weight
243 KB
Volume
143
Category
Article
ISSN
0031-8965

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