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Epitaxial graphene field-effect transistors on silicon substrates

โœ Scribed by Hyun-Chul Kang; Hiromi Karasawa; Yu Miyamoto; Hiroyuki Handa; Tetsuya Suemitsu; Maki Suemitsu; Taiichi Otsuji


Book ID
108271798
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
1005 KB
Volume
54
Category
Article
ISSN
0038-1101

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## Abstract Three types of first generation epitaxial graphene (EG) field effect transistors (FET) are presented and their relative merits are discussed. Graphene is epitaxially grown on both the carbon and silicon faces of hexagonal silicon carbide and patterned with electron beam lithography. The