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Enhanced outdiffusion in ion implanted silicon

✍ Scribed by O. Meyer; J.W. Mayer

Book ID: 107985476
Publisher: Elsevier Science
Year: 1970
Tongue: English
Weight: 137 KB
Volume: 31
Category: Article
ISSN: 0375-9601
DOI: 10.1016/0375-9601(70)91000-5

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