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Avoiding dislocations in ion-implanted silicon

✍ Scribed by F.W. Saris; J.S. Custer; R.J. Schreutelkamp; R.J. Liefting; R. Wijburg; H. Wallinga


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
631 KB
Volume
19
Category
Article
ISSN
0167-9317

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