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Disorder production in ion implanted silicon

✍ Scribed by Kerkow, H. ;Lukasch, B. ;Pippig, R.

Book ID: 105376035
Publisher: John Wiley and Sons
Year: 1982
Tongue: English
Weight: 441 KB
Volume: 70
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210700216

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