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The Energy Dependence of Lattice Disorder in Ion-Implanted Silicon

✍ Scribed by D. A. Marsden; G. R. Bellavance; J. A. Davies; M. Martini; P. Sigmund

Publisher: John Wiley and Sons
Year: 1969
Tongue: English
Weight: 454 KB
Volume: 35
Category: Article
ISSN: 0370-1972
DOI: 10.1002/pssb.19690350126

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