✦ LIBER ✦
Measurement of Local Lattice Parameter in Ion-Implanted Silicon Using HOLZ Lines
✍ Scribed by Uesugi, F. ;Kikuchi, Y. ;Watanabe, K. ;Hashimoto, I.
- Publisher
- John Wiley and Sons
- Year
- 2000
- Tongue
- English
- Weight
- 324 KB
- Volume
- 177
- Category
- Article
- ISSN
- 0031-8965
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