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Enhanced deposition and dielectric property of Ta2O5 thin films on a rugged PtO electrode

โœ Scribed by Tzu-Ping Liu; Wei-Pang Huang; Tai-Bor Wu

Book ID
114617090
Publisher
IEEE
Year
2003
Tongue
English
Weight
364 KB
Volume
50
Category
Article
ISSN
0018-9383

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