✦ LIBER ✦

Energy distribution of Ar ions at the substrate in the sputtering deposition of A-Si: H films

✍ Scribed by M.S. Aida

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Measurement of the striking force of Ar

✍ M.S. Aida; S. Rahmane 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 190 KB

The effect of oxygen on film deposition

✍ Yasuo Gekka; Makio Akimoto; Tohru Kita; Yasuto Ohtani; Hiroshi Kezuka 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 293 KB

Structural properties of a-Si:H related

✍ E.A.G Hamers; W.G.J.H.M van Sark; J Bezemer; H Meiling; W.F van der Weg 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 255 KB

Effect of substrate temperature on the p

✍ Masato Ueda; Takeshi Imura; Yukio Osaka 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 191 KB

Ion and radical reactions in the silane

✍ G. Turban; Y. Catherine; B. Grolleau 📂 Article 📅 1982 🏛 Springer 🌐 English ⚖ 844 KB

Molecular size effect in the chemical sp

✍ P.R. Harris; F.W. Meyer; W. Jacob; T. Schwarz-Selinger; U. von Toussaint 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 435 KB