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Structural properties of a-Si:H related to ion energy distributions in VHF silane deposition plasmas

✍ Scribed by E.A.G Hamers; W.G.J.H.M van Sark; J Bezemer; H Meiling; W.F van der Weg

Book ID: 117149156
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 255 KB
Volume: 226
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(98)00453-0

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