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Measurement of the striking force of Ar ions on the substrate during sputter deposition of a-Si:H thin films

✍ Scribed by M.S. Aida; S. Rahmane

Book ID: 108388913
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 190 KB
Volume: 288
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(96)08822-0

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