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Ellipsometry of anisotropic thin films

✍ Scribed by De Smet, D. J.


Book ID
115383499
Publisher
Optical Society of America
Year
1974
Weight
949 KB
Volume
64
Category
Article
ISSN
0030-3941

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πŸ“œ SIMILAR VOLUMES


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Optical methods are used to determine the thickness of thin metal films, with emphasis on spectroscopic ellipsometry and transmission. We discuss the conditions where this is possible and how to determine the optical constants for the material. The determination of the thickness of each of two metal