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Ellipsometric measurements of the barrier layer in composite aluminum oxide films

✍ Scribed by C.K. Dyer; R.S. Alwitt


Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
715 KB
Volume
23
Category
Article
ISSN
0013-4686

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✦ Synopsis


Ahatract -The composite oxide film (hydrous + anodic) formed on aluminum foil was chemically stripped to remove only the outer hydrous layer. Ellipsometry of the remaining barrier film showed it to be thinner and have a higher refractive index than conventional anodic barrier films grown to the same voltage. Reanodization to improve film stability gave a further increase in refractive index which indicated that the barrier film had contained some voids. The barrier film is almost entirely crystalline y-Al,O, and the higher field strenplth compared with conventional amorphous anodic films on aluminum is believed to be a character&&c of the denser oxide.


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