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Ellipsometric investigations during titanium deposition in a hollow cathode arc evaporation device

✍ Scribed by H. Steffen; H. Wulff

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 1023 KB
Volume: 263
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(95)06549-0

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