Electrothermally-actuated RF-MEMS suspended parallel switch

✍ Scribed by David Girbau; Lluís Pradell; Antonio Lázaro; Àlvar Nebot

• Book ID: 102519872
• Publisher: John Wiley and Sons
• Year: 2007
• Tongue: English
• Weight: 409 KB
• Volume: 49
• Category: Article
• ISSN: 0895-2477
• DOI: 10.1002/mop.22943

✦ Synopsis

Abstract

This article presents an electrothermally‐actuated lateral resistive‐contact RF‐MEMS parallel switch for application to low GHz wireless communication bands. The device is driven by a metal electrothermal actuator, which achieves large displacements and contact forces at much lower temperatures than conventional polysilicon electrothermal actuators. It was manufactured on a standard low‐resistivity substrate and its RF performance was improved by suspending the structures 25 μm from the substrate. Measured (at 1 GHz) insertion loss is −0.11 dB, return loss −41 dB, and isolation −22 dB. © 2007 Wiley Periodicals, Inc. Microwave Opt Technol Lett 49: 2894–2896, 2007; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.22943