## Abstract This article presents an electrothermally‐actuated lateral resistive‐contact RF‐MEMS parallel switch for application to low GHz wireless communication bands. The device is driven by a metal electrothermal actuator, which achieves large displacements and contact forces at much lower temp
✦ LIBER ✦
PZT Actuated Seesaw SPDT RF MEMS Switch
✍ Scribed by Lee, Dae-Sung; Jung, Suk-Won; Cho, Nam-Kyu; Kim, Won-Hyo; Seong, Woo-Kyeong; Park, Hyo-Derk
- Book ID
- 119938216
- Publisher
- Institute of Physics
- Year
- 2006
- Tongue
- English
- Weight
- 462 KB
- Volume
- 34
- Category
- Article
- ISSN
- 1742-6588
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