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Fully integrated electrothermal multidomain modeling of RF MEMS switches

✍ Scribed by Jensen, B.D.; Saitou, K.; Volakis, J.L.; Kurabayashi, K.

Book ID
121247422
Publisher
IEEE
Year
2003
Tongue
English
Weight
266 KB
Volume
13
Category
Article
ISSN
1531-1309

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## Abstract A unified, macroscopic, one‐dimensional model is presented for the quantitative description of the process of dielectric charging in RF MEMS capacitive switches. The model provides for the direct incorporation of various physical factors known to impact dielectric charging, such as surf