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Electronic properties of defects created in epitaxially grown n-Si by low energy He and Ar ions

โœ Scribed by F.D. Auret; P.N.K. Deenapanray; S.A. Goodman; J.B. Malherbe; W.E. Meyer; G. Myburg; M. Hayes


Book ID
118564451
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
408 KB
Volume
127-128
Category
Article
ISSN
0168-583X

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