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Electron Probe Microanalysis of HfO2 Thin Films on Conductive and Insulating Substrates

✍ Scribed by Lulla, Marina ;Asari, Jelena ;Aarik, Jaan ;Kukli, Kaupo ;Rammula, Raul ;Tapper, Unto ;Kauppinen, Eero ;Sammelselg, Väino

Book ID
106196716
Publisher
Springer-Verlag
Year
2006
Weight
111 KB
Volume
155
Category
Article
ISSN
0344-838X

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