Simulation and Modelling of Thin Film ϕ(ρz) Curves for Electron Probe Microanalysis

✍ Scribed by A. Chan; J. D. Brown

• Publisher: John Wiley and Sons
• Year: 1997
• Tongue: English
• Weight: 838 KB
• Volume: 26
• Category: Article
• ISSN: 0049-8246
• DOI: 10.1002/(sici)1097-4539(199709)26:5<279::aid-xrs207>3.0.co;2-a

✦ Synopsis

A method is described for calculating thin Ðlm /(qz) curves from the corresponding bulk /(qz) curves. A multiple scattering Monte Carlo program was used to simulate more than 300 thin Ðlm /(qz) curves with di †erent Ðlmsubstrate combinations. The simulations were made at normal electron incidence in the energy range 10-30 keV. From these data, a general expression was derived to predict thin Ðlm /(qz) curves for any Ðlm-substrate combination at any electron energy for EPMA. Calculated k-ratios were compared with existing measured k-ratios in order to conÐrm the validity of the model.