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Electron Irradiation Influence on Porous Silicon Electrical Parameters

✍ Scribed by Zimin, S.P. ;Zimin, D.S. ;Ryabkin, Yu.V. ;Bragin, A.N.


Publisher
John Wiley and Sons
Year
2000
Tongue
English
Weight
84 KB
Volume
182
Category
Article
ISSN
0031-8965

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✦ Synopsis


Changes of dc conductivity for the porous silicon (PS) with different morphology and different pictures of the depleted areas after the irradiation with high-energy electrons (2 MeV, 2 Γ‚ 10 16 to 1 Γ‚ 10 17 cm Β± Β±2 ) are presented. PS layers of 5Β±60% porosity were formed by anodization of n-type Si (100), 4.5 W cm; n + -Si (111), 0.01 W cm; and p + -Si (111), 0.03 W cm substrates. It is shown that the dc conductivity change after the electron bombardment depends on the structural parameters of PS. Different physical models of the charge carrier transport in PS of various porosity were used for the explanation of the experimental results.


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