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Electron paramagnetic resonance measurements on porous silicon

✍ Scribed by Takato Nakamura; Kazuya Sasaki; Katsumasa Hayashi; Hidenori Mimura; Jun-ichi Kobayashi

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
283 KB
Volume
92
Category
Article
ISSN
0169-4332

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We describe the defect properties in nitrogen plasma treated porous silicon (PS) studied using electron paramagnetic resonance (EPR). We consider the dependence of the paramagnetic properties of the defects on the structure of PS. The nitrogen plasma treatment changed the structure of PS. After the