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Electron cyclotron resonance oxygen plasma etching of diamond

✍ Scribed by Bernard, M.; Deneuville, A.; Ortega, L.; Ayadi, K.; Muret, P.


Book ID
121381242
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
572 KB
Volume
13
Category
Article
ISSN
0925-9635

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