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Electron cyclotron resonance deposition and plasma diagnostics of a-Si:H and a-C:H films

✍ Scribed by Y.H. Shing

Publisher: Elsevier Science
Year: 1989
Weight: 515 KB
Volume: 27
Category: Article
ISSN: 0379-6787
DOI: 10.1016/0379-6787(89)90041-0

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