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Doping efficiency and plasma analysis of a nitrogen electron cyclotron resonance plasma

✍ Scribed by M. Grün; N. Sadeghi; J. Cibert; Y. Genuist; A. Tserepi

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
386 KB
Volume
159
Category
Article
ISSN
0022-0248

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