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Analysis and optimization of the electron cyclotron resonance plasma for nitride epitaxy

✍ Scribed by A. Ohtani; K.S. Stevens; M. Kinniburgh; R. Beresford

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 451 KB
Volume: 150
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(95)80070-s

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