๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Electron and ion beam effects in auger electron spectroscopy on insulating materials

โœ Scribed by Pignatel, G. U.; Queirolo, G.

Book ID
120931112
Publisher
Informa UK (Taylor & Francis)
Year
1983
Weight
957 KB
Volume
79
Category
Article
ISSN
0033-7579

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The advantages of ion etching over wet chemical etching are demonstrated, e,g. structure resolution in the region of the etching depth, no undercutting, excellent reproducibility and high adherence of small striplines.