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Electromigration reliability evaluation for a three-level metallization process

✍ Scribed by Markos Triantafyllou; Antonio Leone

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 554 KB
Volume: 32
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(92)90618-u

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