✦ LIBER ✦
A highly reliable, low cost 0.5 μm three level tungsten metallization
✍ Scribed by M. Hain; H. Körner; B. Neureither; S. Röhl
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 553 KB
- Volume
- 91
- Category
- Article
- ISSN
- 0169-4332
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