Investigation of strontium tantalate thi
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M. Silinskas; M. Lisker; B. Kalkofen; E.P. Burte
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Article
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2006
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Elsevier Science
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English
โ 456 KB
Strontium tantalate (STO) films were grown by liquid-delivery (LD) metalorganic chemical vapor deposition (MOCVD) using Sr[Ta(OEt) 5 (OC 2 H 4 OMe)] 2 as precursor. The deposition of the films was investigated in dependence on process conditions, such as substrate temperature, pressure, and concentr